Home / CCEFP-Fabricated MEMS-scale port plates and piezoelectric actuator arrays

CCEFP-Fabricated MEMS-scale port plates and piezoelectric actuator arrays

Fabricated MEMS-scale port plates (at left) and piezoelectric actuator arrays (at right). 

Credit: 
CCEFP
Related content: 
First Fabrication of MEMS-scale Port Plates and Valve Actuator Arrays using PZT